{"created":"2023-06-20T13:23:25.147615+00:00","id":298,"links":{},"metadata":{"_buckets":{"deposit":"37086948-d27c-4a9a-918c-5245824c7e16"},"_deposit":{"created_by":3,"id":"298","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"298"},"status":"published"},"_oai":{"id":"oai:kougei.repo.nii.ac.jp:00000298","sets":["12:17:56:57"]},"author_link":["799","794","793","802","800","803","804","801","798","796","797","795"],"item_2_biblio_info_12":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1997","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"1","bibliographicPageEnd":"51","bibliographicPageStart":"46","bibliographicVolumeNumber":"20","bibliographic_titles":[{"bibliographic_title":"東京工芸大学工学部紀要"},{"bibliographic_title":"The Academic Reports, the Faculty of Engineering, Tokyo Polytechnic University","bibliographic_titleLang":"en"}]}]},"item_2_description_11":{"attribute_name":"抄録(英)","attribute_value_mlt":[{"subitem_description":"Microstructure, crystallinity and electrical properties of vanadium-added ITO (In : Sn : V=93. 3 : 3.7 : 3.0 at. %) films, which were prepared using conventional rf magnetron sputtering, were compared with ITO (In : Sn=97.8 : 2.2 at. %) films without vanadium. At a substrate temperature of 300℃, the resistivity (ρ) of 1.58×10^<-4> Ωcm with a carrier density (n) of 1.03×10^<21>cm^<-3> and Hall mobility (μ) of 38.3 cm^2 V^<-1>s^<-1> was obtained for the vanadium-added ITO film, whereas ρ=3.27×10^<-4> Ωcm with n=3.99×10^<20>cm^<-3> and μ=48.0cm^2V^<-1>s^<-1> was obtained for the ITO film without vanadium addition. The vanadium addition enhanced the crystallinity and the densification of In_20_3 lattice. The enhanced electrical conductivity (increase in the carrier density) due to vanadium addition is explamed by the increase in the efficiency of Sn doping. The effect of vanadium addition is similar to that of silver addition into ITO films as reported elsewhere by the present authors.","subitem_description_type":"Other"}]},"item_2_description_15":{"attribute_name":"表示順","attribute_value_mlt":[{"subitem_description":"8","subitem_description_type":"Other"}]},"item_2_description_16":{"attribute_name":"アクセション番号","attribute_value_mlt":[{"subitem_description":"KJ00002353310","subitem_description_type":"Other"}]},"item_2_description_8":{"attribute_name":"記事種別(日)","attribute_value_mlt":[{"subitem_description":"論文","subitem_description_type":"Other"}]},"item_2_description_9":{"attribute_name":"記事種別(英)","attribute_value_mlt":[{"subitem_description":"Article","subitem_description_type":"Other"}]},"item_2_source_id_1":{"attribute_name":"雑誌書誌ID","attribute_value_mlt":[{"subitem_source_identifier":"AN00159741","subitem_source_identifier_type":"NCID"}]},"item_2_source_id_19":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"03876055","subitem_source_identifier_type":"ISSN"}]},"item_2_text_6":{"attribute_name":"著者所属(日)","attribute_value_mlt":[{"subitem_text_value":"東京工芸大学大学院"},{"subitem_text_value":"東京工芸大学工学部工業化学科:辰口工業硝子(株)"},{"subitem_text_value":"東京工芸大学工学部工業化学科:(現)エービーシー商会"},{"subitem_text_value":"東京工芸大学大学院"},{"subitem_text_value":"東京工芸大学工学部工業化学科"},{"subitem_text_value":"東海大学工学部工業化学科"}]},"item_2_title_3":{"attribute_name":"論文名よみ","attribute_value_mlt":[{"subitem_title":"バナジウム テンカブツ ITOマク ノ ビコウゾウ ト デンキトクセイ"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"鈴木, 正和"},{"creatorName":"スズキ, マサカズ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"793","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"前田, より子"},{"creatorName":"マエダ, ヨリコ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"794","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"村岡, 正洋"},{"creatorName":"ムラオカ, マサヒロ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"795","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"関, 成之"},{"creatorName":"セキ, シゲユキ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"796","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"澤田, 豊"},{"creatorName":"サワダ, ユタカ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"797","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"松下, 純一"},{"creatorName":"マツシタ, ジュンイチ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"798","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"SUZUKI, Masakazu","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"799","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"MAEDA, Yoriko","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"800","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"MURAOKA, Masahiro","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"801","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"SEKI, Shigeyuki","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"802","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"SAWADA, Yutaka","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"803","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"MATSUSHITA, Junichi","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"804","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-04-21"}],"displaytype":"detail","filename":"KJ00002353310.pdf","filesize":[{"value":"866.0 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KJ00002353310.pdf","url":"https://kougei.repo.nii.ac.jp/record/298/files/KJ00002353310.pdf"},"version_id":"16a62d8c-5119-4268-8b1d-68bde285ff24"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"バナジウム添加ITO膜の微構造と電気特性","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"バナジウム添加ITO膜の微構造と電気特性"},{"subitem_title":"Microstructure and electrical properties of vanadium-added ITO films","subitem_title_language":"en"}]},"item_type_id":"2","owner":"3","path":["57"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-04-21"},"publish_date":"2017-04-21","publish_status":"0","recid":"298","relation_version_is_last":true,"title":["バナジウム添加ITO膜の微構造と電気特性"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2023-06-20T14:21:07.167019+00:00"}