@article{oai:kougei.repo.nii.ac.jp:00002090,
 author = {陳, 軍 and Chen, Jun},
 issue = {1},
 journal = {東京工芸大学工学部紀要, The Academic Reports, the Faculty of Engineering, Tokyo Polytechnic University},
 month = {Jun},
 note = {光導波路や活きた生物細胞の高精度定量計測のために、我々は複プリズムやウォラストンプリズムの横移動を用いた共通光路位相シフト干渉顕微鏡を開発してきた。この方法では、交通光路の構造から、除振台なしでの干渉計測が可能や、非常に高い位相計測の安定性と再現性をゆする。本研究では、このような特徴を活かし、システム誤差や位相シフト誤差の低減法を提案し、サブナノの位相計測再現性を実現した。, Several techniques are presented for improving the phase measurement accuracy of the common-path phase-shifting interference microscope. Experimental results for elimination of the system phase error using a subtraction procedure is shown. The residual RMS phase error smaller as λ/1000 corresponding to 0.6nm was achieved. Experimental results for measuring the refractive index distribution of polarization-maintaining optical fibers are presented to demonstrate the usefulness of the method.},
 pages = {25--28},
 title = {複プリズムを用いた共通光路位相シフト干渉顕微鏡の高精度化の研究},
 volume = {43},
 year = {2020},
 yomi = {チン, グン}
}