{"created":"2023-06-20T13:23:15.796772+00:00","id":162,"links":{},"metadata":{"_buckets":{"deposit":"9eab2ea2-6a25-4b6e-b471-b392c1f09666"},"_deposit":{"created_by":3,"id":"162","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"162"},"status":"published"},"_oai":{"id":"oai:kougei.repo.nii.ac.jp:00000162","sets":["12:17:38:39"]},"author_link":["403","397","395","401","404","396","402","400","398","399"],"item_2_biblio_info_12":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1989","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"1","bibliographicPageEnd":"102","bibliographicPageStart":"95","bibliographicVolumeNumber":"12","bibliographic_titles":[{"bibliographic_title":"東京工芸大学工学部紀要"},{"bibliographic_title":"The Academic Reports, the Faculty of Engineering, Tokyo Polytechnic University","bibliographic_titleLang":"en"}]}]},"item_2_description_11":{"attribute_name":"抄録(英)","attribute_value_mlt":[{"subitem_description":"This paper presents an electrostatic analyzer and its systems to measure densities of both ions and electrons impinging upon growing film surfaces and their energy distributions in a reactive plasma. The electrostatic analyzer consists of four electrodes spaced closely in comparison with electron and ion mean free paths, and is placed on the substrate holder of our ECR plasma reactor. A personal computor is adopted for automatically measuring electron-energy distribution, reducing measurement time from 1 hour to 5 minutes. Ion-energy distribution is drifting Maxwellian, and both ion peak energy and ion temperature are found to be higher for the smaller total flow-rate of germane diluted by hydrogen. Electron-energy distribution can be described by a two-temperature model and both temperatures are higher for the lower total flow-rate.","subitem_description_type":"Other"}]},"item_2_description_15":{"attribute_name":"表示順","attribute_value_mlt":[{"subitem_description":"13","subitem_description_type":"Other"}]},"item_2_description_16":{"attribute_name":"アクセション番号","attribute_value_mlt":[{"subitem_description":"KJ00001511962","subitem_description_type":"Other"}]},"item_2_description_8":{"attribute_name":"記事種別(日)","attribute_value_mlt":[{"subitem_description":"論文","subitem_description_type":"Other"}]},"item_2_description_9":{"attribute_name":"記事種別(英)","attribute_value_mlt":[{"subitem_description":"Article","subitem_description_type":"Other"}]},"item_2_source_id_1":{"attribute_name":"雑誌書誌ID","attribute_value_mlt":[{"subitem_source_identifier":"AN00159741","subitem_source_identifier_type":"NCID"}]},"item_2_source_id_19":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"03876055","subitem_source_identifier_type":"ISSN"}]},"item_2_text_6":{"attribute_name":"著者所属(日)","attribute_value_mlt":[{"subitem_text_value":"東京工芸大学工学部電子工学科"},{"subitem_text_value":"東京工芸大学工学部電子工学科"},{"subitem_text_value":"株式会社東芝"},{"subitem_text_value":"東北リコー株式会社"},{"subitem_text_value":"東京工芸大学工学部電子工学科"}]},"item_2_title_3":{"attribute_name":"論文名よみ","attribute_value_mlt":[{"subitem_title":"Electrostatic Analyzer ニ ヨル ハンノウセイ プラズマ ノ シンダン"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"西川, 泰央"},{"creatorName":"ニシカワ, ヤスオ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"395","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"中野, 幹夫"},{"creatorName":"ナカノ, ミキオ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"396","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"小林, 良嗣"},{"creatorName":"コバヤシ, ヨシツグ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"397","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"加藤, 静一"},{"creatorName":"カトウ, セイイチ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"398","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"青木, 彪"},{"creatorName":"アオキ, タケシ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"399","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"NISHIKAWA, Yasuo","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"400","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"NAKANO, Mikio","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"401","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"KOBAYASHI, Yoshitugu","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"402","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"KATO, Seiichi","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"403","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"AOKI, Takeshi","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"404","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-04-21"}],"displaytype":"detail","filename":"KJ00001511962.pdf","filesize":[{"value":"577.1 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KJ00001511962.pdf","url":"https://kougei.repo.nii.ac.jp/record/162/files/KJ00001511962.pdf"},"version_id":"6c6544aa-d910-4a46-b682-772b3005ce2c"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Electrostatic Analyzerによる反応性プラズマの診断","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Electrostatic Analyzerによる反応性プラズマの診断"},{"subitem_title":"Diagnosis of Reactive Plasma by Means of Electrostatic Analyzer","subitem_title_language":"en"}]},"item_type_id":"2","owner":"3","path":["39"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-04-21"},"publish_date":"2017-04-21","publish_status":"0","recid":"162","relation_version_is_last":true,"title":["Electrostatic Analyzerによる反応性プラズマの診断"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2023-06-20T14:23:46.754508+00:00"}