{"created":"2023-06-20T13:23:12.554894+00:00","id":120,"links":{},"metadata":{"_buckets":{"deposit":"c93bc502-79e8-4d42-a649-e9994bfea973"},"_deposit":{"created_by":3,"id":"120","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"120"},"status":"published"},"_oai":{"id":"oai:kougei.repo.nii.ac.jp:00000120","sets":["12:17:34:35"]},"author_link":["274","272","273","275"],"item_2_biblio_info_12":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1986","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"1","bibliographicPageEnd":"19","bibliographicPageStart":"11","bibliographicVolumeNumber":"9","bibliographic_titles":[{"bibliographic_title":"東京工芸大学工学部紀要"},{"bibliographic_title":"The Academic Reports, the Faculty of Engineering, Tokyo Polytechnic University","bibliographic_titleLang":"en"}]}]},"item_2_description_11":{"attribute_name":"抄録(英)","attribute_value_mlt":[{"subitem_description":"An automatic spectroscopic ellipsometer of a rotating analyzer type is described, which is able to determine the optical constants of the samples in the spectral range of 370 nm to 800 nm. The elliPsometer is fully controlled by the micro computer and the spectroscopic measurements are accomplished automatically following the program. As the preliminary experiments,we carried out the measurements of the optical constants of the thick evaporated Au films in the spectral range of 450 nm to 750 nm. The experimental results almost agreed with those of Schulz and Bashara et al in the literature, except for the samples that were seriously affected by the residual gas in the evaporation. We also carried out the measurements of SiO_2 and MgF_2 films on Si wafer at the two wavelengths of 546 nm and 633 nm. The thickness of those films could be determined consistently in each wavelength.","subitem_description_type":"Other"}]},"item_2_description_15":{"attribute_name":"表示順","attribute_value_mlt":[{"subitem_description":"6","subitem_description_type":"Other"}]},"item_2_description_16":{"attribute_name":"アクセション番号","attribute_value_mlt":[{"subitem_description":"KJ00002353291","subitem_description_type":"Other"}]},"item_2_description_8":{"attribute_name":"記事種別(日)","attribute_value_mlt":[{"subitem_description":"論文","subitem_description_type":"Other"}]},"item_2_description_9":{"attribute_name":"記事種別(英)","attribute_value_mlt":[{"subitem_description":"Article","subitem_description_type":"Other"}]},"item_2_source_id_1":{"attribute_name":"雑誌書誌ID","attribute_value_mlt":[{"subitem_source_identifier":"AN00159741","subitem_source_identifier_type":"NCID"}]},"item_2_source_id_19":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"03876055","subitem_source_identifier_type":"ISSN"}]},"item_2_text_6":{"attribute_name":"著者所属(日)","attribute_value_mlt":[{"subitem_text_value":"東京工芸大学工学部物性工学研究室"},{"subitem_text_value":"東京工芸大学工学部画像工学科"}]},"item_2_title_3":{"attribute_name":"論文名よみ","attribute_value_mlt":[{"subitem_title":"ジドウブンコウ ヘンコウ カイセキソウチ ノ シサク"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"川畑, 州一"},{"creatorName":"カワバタ, シュウイチ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"272","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"宮田, 浩幸"},{"creatorName":"ミヤタ, ヒロユキ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"273","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"KAWABATA, Shuichi","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"274","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"MIYATA, Hiroyuki","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"275","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-04-21"}],"displaytype":"detail","filename":"KJ00002353291.pdf","filesize":[{"value":"632.5 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KJ00002353291.pdf","url":"https://kougei.repo.nii.ac.jp/record/120/files/KJ00002353291.pdf"},"version_id":"3f93f2fd-aaa3-4c25-8475-b0c02c94b6b6"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"自動分光偏光解析装置の試作","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"自動分光偏光解析装置の試作"},{"subitem_title":"An automatic spectroscopic ellipsometer of a rotating analyzer type","subitem_title_language":"en"}]},"item_type_id":"2","owner":"3","path":["35"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-04-21"},"publish_date":"2017-04-21","publish_status":"0","recid":"120","relation_version_is_last":true,"title":["自動分光偏光解析装置の試作"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2023-06-20T14:24:35.815154+00:00"}