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超精密光学平面の平面度の測定 Accurate Testing Methods of Optical Plates チョウセイミツコウガクヘイメン ノ ヘイメンド ノ ソクテイ 伊藤, 進一 イトウ, シンイチ ITO, Shin-ichi Two types of testing methods of accurate optical Plates are proposed and experimentally examined. They are developed in connection with Fabry-Perot etalons which are used as a monochrometer in Brillouin scattering experiment. Parallelism and relative flatness of etalons are defined so that they are independent quantities each other. The first method proposed is a PhotograPhic testing one with a multilens and it is shown that this system can determine the relative flatness to an accuracy of about λ/1000, here λ=6328A. The second method is a pressure scanning and photoelectrc detection method using a multilens and a microcomputer. The accuracy obtained by this system is higher than the accuracy obtained by the photographic method. 5 KJ00001511875 論文 Article 1981 jpn departmental bulletin paper https://kougei.repo.nii.ac.jp/records/35 AN00159741 03876055 東京工芸大学工学部紀要 The Academic Reports, the Faculty of Engineering, Tokyo Polytechnic University 4 1 18 23 https://kougei.repo.nii.ac.jp/record/35/files/KJ00001511875.pdf application/pdf 365.1 kB 2017-04-21